Title:
板状被処理物を熱処理する熱処理装置および熱処理方法
Document Type and Number:
Japanese Patent JP4003204
Kind Code:
B2
More Like This:
Inventors:
Atsushi Hiura
Shohei Tsuji
Shohei Tsuji
Application Number:
JP2000354119A
Publication Date:
November 07, 2007
Filing Date:
November 21, 2000
Export Citation:
Assignee:
Koyo Thermo System Co., Ltd.
International Classes:
C21D1/00; H01L21/26; F27B5/04; H01L21/60
Domestic Patent References:
| JP2000286535A | ||||
| JP11147724A | ||||
| JP11126744A | ||||
| JP8203908A |
Attorney, Agent or Firm:
Einosuke Kishimoto
Moriichi Kishimoto
Akira Watanabe
Norihiko Hibi
Kiyosue Yasuko
Moriichi Kishimoto
Akira Watanabe
Norihiko Hibi
Kiyosue Yasuko