Title:
A thickness measurement device and the film-thickness-measurement method
Document Type and Number:
Japanese Patent JP6096725
Kind Code:
B2
Inventors:
High Yanagi
Hideyuki Otake
Aikyo Hideyuki
Fujisawa Yasunari
Atsushi Nabeshima
Hideyuki Otake
Aikyo Hideyuki
Fujisawa Yasunari
Atsushi Nabeshima
Application Number:
JP2014182859A
Publication Date:
March 15, 2017
Filing Date:
September 09, 2014
Export Citation:
Assignee:
Aisin Seiki Co., Ltd.
TOYOTA JIDOSHA KABUSHIKI KAISHA
TOYOTA JIDOSHA KABUSHIKI KAISHA
International Classes:
G01B11/06; G01B15/02
Domestic Patent References:
| JP2011196990A | ||||
| JP5231538B1 | ||||
| JP2004354246A | ||||
| JP2008096210A | ||||
| JP2014122875A |
Foreign References:
| US20160069673 |
Attorney, Agent or Firm:
Okabe
Koji Yoshizawa
Takashi Kawasaki
Koji Yoshizawa
Takashi Kawasaki