Title:
Thin film transistor and its manufacturing method
Document Type and Number:
Japanese Patent JP6326752
Kind Code:
B2
Inventors:
Takeshi Sonoda
Teruhige Hino
Teruhige Hino
Application Number:
JP2013189652A
Publication Date:
May 23, 2018
Filing Date:
September 12, 2013
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
H01L29/786; H01L21/3065
Domestic Patent References:
| JP8321623A | ||||
| JP7312425A | ||||
| JP2009152576A | ||||
| JP2002343811A | ||||
| JP2010251732A | ||||
| JP2002324857A | ||||
| JP6196451A | ||||
| JP5335285A | ||||
| JP2004193248A |
Foreign References:
| US20090137087 | ||||
| US20120043544 | ||||
| US20100244034 |
Attorney, Agent or Firm:
Tadahiko Inaba
Kanako Murakami
Shigeaki Matsui
Kuratani Yasutaka
Kanako Murakami
Shigeaki Matsui
Kuratani Yasutaka