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Title:
The training method of a silicon single crystal
Document Type and Number:
Japanese Patent JP6044530
Kind Code:
B2
Abstract:
A method for growing a silicon single crystal using a single crystal growing device which is provided with a water-cooled body that encloses a growing single crystal and which is provided with a thermal shield that surrounds an outer peripheral face and lower end face of the water-cooled body, the method comprising, when growing a single crystal with a radius of Rmax(mm), pulling the single crystal under a condition which satisfies formula (A) in a range of 0

Inventors:
Ryota Suewaka
Application Number:
JP2013252339A
Publication Date:
December 14, 2016
Filing Date:
December 05, 2013
Export Citation:
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Assignee:
Sumco inc.
International Classes:
C30B29/06
Domestic Patent References:
JP2010265151A
JP2010275170A
Foreign References:
WO2014034028A1
Attorney, Agent or Firm:
Ascend Patent Business Corporation