A transparent conductive film, a device using this or a solar cell, and a manufacturing method of a transparent conductive film

Title:

A transparent conductive film, a device using this or a solar cell, and a manufacturing method of a transparent conductive film

Document Type and Number:

Japanese Patent JP6037239

Kind Code:

B2

Abstract:

[Problem] To provide: a transparent conductive film which achieves high hole mobility by adequately adjusting the cerium concentration and the partial pressure of the hydrogen source in the growth atmosphere; a device or a solar cell using this transparent conductive film; and a method for producing a transparent conductive film. [Solution] A transparent conductive film 12 which is formed of a polycrystalline structure of indium oxide containing hydrogen and a lanthanoid element, and which is characterized by having a hole mobility of 120 cm2/(V·s) or more.

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Inventors:

Eiji Kobayashi

Application Number:

JP2014186841A

Publication Date:

December 07, 2016

Filing Date:

September 12, 2014

Export Citation:

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Assignee:

Choshu Industry Co., Ltd.

International Classes:

H01B5/14; C23C14/08; G02F1/1343; H01B13/00; H01G9/20; H01L31/0224; H01L31/18; H01L51/50; H05B33/14; H05B33/28

Domestic Patent References:

JP8245220A
JP2012253315A

Foreign References:

WO2011034143A1
WO2011115177A1

Attorney, Agent or Firm:

Yuichi Murakami
Takahiro Deguchi
Hiroshi Seki

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