Title:
ターボ分子ポンプ
Document Type and Number:
Japanese Patent JP7327183
Kind Code:
B2
Abstract:
To provide a turbo molecular pump that can reduce deposition of a product on rotor blades.SOLUTION: The turbo molecular pump comprises: a pump rotor 2 in which a plurality of stages of rotor blades 20a-20d and a cylindrical rotor 21 are formed; a base part 4a; a plurality of stages of stator blades 22a and 22b; a plurality of spacer rings 24a-24d for sandwiching the plurality of stages of stator blades 22a and 22b respectively, and positioning and arranging the plurality of stages of sandwiched stator blades 22a and 22b on a portion in the base part 4a opposed to a turbo pump part 2A; a cylindrical stator 23 arranged on an outer peripheral side of the cylindrical rotor 21 via a predetermined gap, and fixed on the portion in the base part 4a opposed to the turbo pump part 2A; and a heater 5 arranged on the portion in the base part 4a opposed to the turbo pump part 2A, for heating the cylindrical stator 23 and the stator blades 22a and 22b.SELECTED DRAWING: Figure 4
Inventors:
Tomoki Yasuda
Application Number:
JP2020012983A
Publication Date:
August 16, 2023
Filing Date:
January 29, 2020
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
F04D19/04
Domestic Patent References:
| JP2015086856A | ||||
| JP2018084191A | ||||
| JP2015229949A |
Attorney, Agent or Firm:
Takuji Yamashita
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