Title:
液封型圧力センサ
Document Type and Number:
Japanese Patent JP4708679
Kind Code:
B2
Abstract:
A pressure sensor includes a diaphragm for sealing liquid. The diaphragm includes a plurality of convexities, which are disposed concentrically on the diaphragm. Each convexity has a circular arc cross-section in a radial direction and has a ring shape. The sensor has a configuration factor. The configuration factor is in a range between 2.5 and 3.5. The diaphragm of the sensor has excellent deformability so that detection error of the sensor is reduced.
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Inventors:
Hironobu Baba
Tokunaga Masatoshi
Tokunaga Masatoshi
Application Number:
JP2003090972A
Publication Date:
June 22, 2011
Filing Date:
March 28, 2003
Export Citation:
Assignee:
株式会社デンソー
International Classes:
G01L13/02; G01L7/08; G01L9/00; G01L19/04; G01L19/06
Domestic Patent References:
JP11132887A |
Attorney, Agent or Firm:
Takashi Ito
Takanori Kubo
Akira Nagai
Hirohiko Usui
Takanori Kubo
Akira Nagai
Hirohiko Usui