Title:
単結晶引上げ機の不活性ガス排気系の水封式真空ポンプ
Document Type and Number:
Japanese Patent JP4093530
Kind Code:
B2
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Inventors:
Ryoichi Daichi
Tsutomu Higuchi
Tsutomu Higuchi
Application Number:
JP2001260680A
Publication Date:
June 04, 2008
Filing Date:
August 30, 2001
Export Citation:
Assignee:
Sumco inc.
Unosawa Gumi Co., Ltd.
Unosawa Gumi Co., Ltd.
International Classes:
F04C19/00; F04C25/02; C30B15/00; C30B29/06; F04B37/16; F04C29/12; F04C13/00; F04C29/00
Domestic Patent References:
| JP2001104903A | ||||
| JP61167196A | ||||
| JP2291493A | ||||
| JP8192002A |
Attorney, Agent or Firm:
Masayoshi Suda