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Patent Searching and Data


Title:
An ultrasonic transformer juicer device of micro processing with the metal-semiconductor contact part for capacitive cross talk reduction
Document Type and Number:
Japanese Patent JP6273297
Kind Code:
B2
Abstract:
Embodiments reduce capacitive cross-talk between micromachined ultrasonic transducer (MUT) arrays through grounding of the substrate over which the arrays are fabricated. In embodiments, a metal-semiconductor contact is formed to a semiconductor device layer of a substrate and coupled to a ground plane common to a first electrode of the transducer elements to suppress capacitive coupling of signal lines connected to a second electrode of the transducer elements.

Inventors:
Hajati Armand
Latte dimitre
Gardner Dean
Loofen-Phi Stephen
Application Number:
JP2015556969A
Publication Date:
January 31, 2018
Filing Date:
January 30, 2014
Export Citation:
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Assignee:
Fujifilm Dimatics, Inc.
International Classes:
H04R17/00; H01L41/047; H01L41/09; H01L41/113; H01L41/29; H04R31/00
Domestic Patent References:
JP2006122188A
Foreign References:
US20120206014
Attorney, Agent or Firm:
Takaki Nishijima
Disciple Maru Ken
Shinichiro Tanaka
Fumiaki Otsuka
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo