Title:
紫外線発生源、紫外線照射処理装置及び半導体製造装置
Document Type and Number:
Japanese Patent JP3972126
Kind Code:
B2
Abstract:
The present invention relates to an ultraviolet ray generator 101, and the generator 101 has an ultraviolet ray lamp 1, a protective tube 2 being made of a material which is transparent with respect to ultraviolet ray and housing the ultraviolet ray lamp 1, and gas introduction port 6a introducing nitrogen gas or inert gas into the protective tube 2.
Inventors:
Toshiyuki Ohira
Kimi Shioya
Kimi Shioya
Application Number:
JP2004160113A
Publication Date:
September 05, 2007
Filing Date:
May 28, 2004
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
Semiconductor Process Laboratory Co., Ltd.
Semiconductor Process Laboratory Co., Ltd.
International Classes:
H01L21/31; C23C16/40; C23C16/56; F27B17/00; F27D99/00; H01J61/04; H01J61/34; H01J61/50; H01J61/52; H01J65/04; H01L21/00
Domestic Patent References:
| JP2001129391A | ||||
| JP61131421A | ||||
| JP2003109954A | ||||
| JP2001102373A | ||||
| JP2003133301A |
Attorney, Agent or Firm:
Keizo Okamoto