PURPOSE: To provide the powder agitator constituted to improve the property to agitate powder and to hardly electrify the powder with a plus charge as the powder agitator to be used for an ion implantation device and ion beam vapor deposition device.
CONSTITUTION: This powder agitator 11 is composed of a base plate 12, a container 13 housing the powder, plural supports 15 for supporting the container 13 on the base plate 12 and a pair of piezoelectric elements 14, 14 as a vibration generating section disposed on these supports 15. The container 13 is oscillated in a rotating direction by impressing a voltage to these piezoelectric elements 14, 14 and the speed of oscillation is varied according to the oscillation direction, by which the powder in the container 13 is agitated.
YONEZAWA SADAHISA
ITO SHIGEO