Title:
単軸の真空容積型ポンプ
Document Type and Number:
Japanese Patent JP2008531910
Kind Code:
A
Abstract:
The single shaft pump has two pump stages (12,14) and a drive motor (16) mounted axially between same. The shaft (22) supports two pump rotors (13,15) and the motor rotor (17). Two rolling bearings (32, 34) can be provided between the motor rotor and pump rotors. The shaft is surrounded by a stator housing which has no shaft seal. The motor rotor acts as a lubricant pump to pump lubricant from the high vacuum pump stage to the pre-vacuum pump stage on the output side.
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Inventors:
Michael hertzmere
Application Number:
JP2007556580A
Publication Date:
August 14, 2008
Filing Date:
January 27, 2006
Export Citation:
Assignee:
Oerlikon Leybold Vacuum GmbH
International Classes:
F04C23/00; F04C25/02; F04C27/00; F04C29/00
Domestic Patent References:
| JP2000130365A | 2000-05-12 | |||
| JPH07318179A | 1995-12-08 | |||
| JPH03151989A | 1991-06-28 | |||
| JPH05302581A | 1993-11-16 | |||
| JPH08219059A | 1996-08-27 | |||
| JP2004316485A | 2004-11-11 |
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Hiroshi Sugimoto
Kimihiro Hoshi
Hiroyasu Ninomiya
Einzel Felix-Reinhard
Reinhard Einsel
Toshiomi Yamazaki
Takuya Kuno
Hiroshi Sugimoto
Kimihiro Hoshi
Hiroyasu Ninomiya
Einzel Felix-Reinhard
Reinhard Einsel