Title:
VACUUM COOLING DEVICE
Document Type and Number:
Japanese Patent JP2022153117
Kind Code:
A
Abstract:
To provide a vacuum cooling device capable of moderating change in pressure in a tank when the number of vacuum pumps to be driven is reduced.SOLUTION: A vacuum cooling device for cooling an object to be cooled housed in a treatment tank, comprises a plurality of vacuum pumps and a heat exchanger, where the plurality of vacuum pumps is arranged in parallel and connected to the treatment tank via the heat exchanger; the heat exchanger is configured to be able to condense steam exhausted from the treatment tank; and an opening adjustment valve is provided in an intake line of at least one vacuum pump among the plurality of vacuum pumps.SELECTED DRAWING: Figure 1
Inventors:
SADO KATSUYA
HIRATA KEI
HIRATA KEI
Application Number:
JP2021056183A
Publication Date:
October 12, 2022
Filing Date:
March 29, 2021
Export Citation:
Assignee:
MIURA KOGYO KK
International Classes:
F25D7/00; F04B37/16; F04C25/02
Attorney, Agent or Firm:
SK Patent Attorney Corporation
Akihiko Okuno
Hiroyuki Ito
Akihiko Okuno
Hiroyuki Ito