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Title:
減圧乾燥装置および減圧乾燥方法
Document Type and Number:
Japanese Patent JP5871646
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a vacuum drying apparatus that can reduce mixing of moisture to recover a solvent while decompression-drying a coating liquid on a substrate, and a vacuum drying method.SOLUTION: A vacuum drying apparatus 1 includes: a chamber 2 for accommodating a substrate W; an exhaust device 3 for exhausting a gas in the chamber 2; a recovery device 4 for cooling a gas to recover a liquid generated by cooling; and first piping 5 that connects the chamber 2 to the exhaust device 3 via the recovery device 4 on the way. The vacuum drying apparatus decompression-dries a coating liquid R applied on the substrate W by making the exhaust device 3 exhaust the gas in the chamber 2 through the first piping 5 to perform decompression. The solvent is recovered by liquefying the solvent evaporated from the coating liquid R through decompression drying to be cooled by the recovery device 4. Second piping 6 is further provided that connects the chamber 2 with the exhaust device 3 not by way of the recovery device 4 on the way.

Inventors:
Shunichi Okamoto
Shigeo Uchigata
Daisuke Okuda
Application Number:
JP2012028331A
Publication Date:
March 01, 2016
Filing Date:
February 13, 2012
Export Citation:
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Assignee:
Toray Engineering Co., Ltd.
International Classes:
F26B5/04; F26B9/06
Domestic Patent References:
JP2010169281A
JP11030478A
JP2009275924A
JP201086981A
JP4177956B2