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Patent Searching and Data


Title:
移動体支持装置と、これを含む真空蒸着装置及び蒸着方法
Document Type and Number:
Japanese Patent JP6497688
Kind Code:
B2
Abstract:
To suppress a moment of rotation from acting unexpectedly on a rotary movement part.SOLUTION: A vacuum deposition device according to the present invention includes: a vacuum chamber; a moving body installed movably in the vacuum chamber; and a rotary moving part which is arranged between a surface constituting the vacuum chamber and the moving body, and has one end part coupled to the moving body and the other end part coupled rotatably to the surface constituting the vacuum chamber, and also can move relatively in a direction along the axis of rotation, the surface constituting the vacuum chamber having an opening, and the rotary moving part having a hollow part linked to outside the vacuum chamber through the opening. Further, the vacuum deposition device includes force imparting means which is installed at the side of the other end part of the rotary moving part, and applies force in the direction along the axis of rotation and in a direction from the inner side to the outer side of the vacuum chamber.SELECTED DRAWING: Figure 3

Inventors:
Kazuhiro Watanabe
Akira Ota
Onojima Noboru
Application Number:
JP2018116011A
Publication Date:
April 10, 2019
Filing Date:
June 19, 2018
Export Citation:
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Assignee:
Canon Tokki Co., Ltd.
International Classes:
C23C14/24; F16J3/04; F16J15/43
Domestic Patent References:
JP2009259989A
JP2007216364A
Attorney, Agent or Firm:
Takeshi Niwa
Takeshi Nakamura
Koichiro Sakai
Ryota Morihiro
Yoshiyuki Kawaguchi