Title:
冷陰極電離真空計、該冷陰極電離真空計を備えた真空処理装置、該冷陰極電離真空計に用いる放電開始補助電極、該冷陰極電離真空計を用いた圧力測定方法
Document Type and Number:
Japanese Patent JP5579038
Kind Code:
B2
Abstract:
The present invention provides a cold cathode ionization vacuum gauge that can trigger discharge in a short time even after a long period of operation. The cold cathode ionization vacuum gauge of an embodiment of the present invention includes an anode, a cathode disposed so as to form a discharge space together with the anode, and a discharge starting auxiliary electrode disposed in the discharge space and electrically connected to the cathode. The discharge starting auxiliary electrode has an electrode part disposed in parallel with an axially longitudinal direction of the anode.
Inventors:
Kawasaki A 洋 assistant
Hideo Mano
Hideo Mano
Application Number:
JP2010273245A
Publication Date:
August 27, 2014
Filing Date:
December 08, 2010
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
G01L21/34
Attorney, Agent or Firm:
Iwata Today sentence
Seto さより
Seto さより