Title:
真空ポンプ装置、及び該真空ポンプ装置に用いられるポンプ本体ユニット、制御ユニット、並びにスペーサ
Document Type and Number:
Japanese Patent JP7048210
Kind Code:
B2
Abstract:
Provided is a vacuum pump apparatus which allows reductions in thickness, weight, size, and cost of a vacuum pump control device. In the vacuum pump apparatus, a pump main body unit and a control unit which controls driving of the pump main body unit are integrated with each other. The vacuum pump apparatus has a configuration in which a spacer configured to support a load applied to a housing of the control unit is provided between a base of the pump main body unit and the housing of the control unit.
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Inventors:
Sakaguchi Yuyuki
Son Hikobuki
Kengo Saegusa
Hideki Omori
Son Hikobuki
Kengo Saegusa
Hideki Omori
Application Number:
JP2017008275A
Publication Date:
April 05, 2022
Filing Date:
January 20, 2017
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04D19/04; F04B37/16; F04D29/52; F04D29/64
Domestic Patent References:
| JP3165857B2 | ||||
| JP6246898U | ||||
| JP201561393A | ||||
| JP2000183552A | ||||
| JP5952191B2 |
Attorney, Agent or Firm:
Takamitsu Shimizu