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Patent Searching and Data


Title:
真空ポンプシステムとその制御方法
Document Type and Number:
Japanese Patent JP4451615
Kind Code:
B2
Abstract:
A vacuum pump system (10; 36; 46) for pumping gas from an enclosure (12) comprises: a vacuum pump unit (14) having a pump inlet (16) connectable with an outlet (18) of such an enclosure and a pump outlet (20) for exhausting gas; and a chamber (22; 50) selectively connectable with the pump inlet and the pump outlet, such that, in use, in a first state gas can be pumped from the chamber to the pump inlet by the vacuum pump unit and in a second state gas can be evacuated from the pump outlet to the chamber to reduce pressure at the pump outlet. A method of controlling the vacuum pump system (10; 36; 46) comprises a first step of pumping gas from the chamber to the pump inlet using the vacuum pump unit and a second step of allowing gas to be evacuated from the pump outlet to the chamber to reduce pressure at the pump outlet.

Inventors:
Savage, Derek Graham Madgewick
Turner, nail
Huntley, Graham
Application Number:
JP2003155128A
Publication Date:
April 14, 2010
Filing Date:
May 30, 2003
Export Citation:
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Assignee:
Edwards Limited
International Classes:
F04B37/16; F04B49/06; F04B19/00; F04C28/24
Domestic Patent References:
JP102787C2
JP2124295U
JP2081988A
JP2001102281A
Foreign References:
US5088895
Attorney, Agent or Firm:
Yoshio Inoue