Title:
ネジ溝ポンプ機構、該ネジ溝ポンプ機構を用いた真空ポンプ、並びに前記ネジ溝ポンプ機構に用いられるロータ、外周側ステータ及び内周側ステー
Document Type and Number:
Japanese Patent JP6608283
Kind Code:
B2
Abstract:
The present invention provides a thread groove pump mechanism which suppresses a backflow of the gas in the thread groove pump mechanism and reduces the pressure difference in the pump radial direction near the outlet of the thread groove pump mechanism to thereby improve the exhaust performance and the compression performance. The present invention also provides a vacuum pump including the thread groove pump mechanism, and a rotor, an outer circumference side stator, and an inner circumference side stator used in the thread groove pump mechanism. A thread groove pump mechanism includes an exhaust-performance improving means in an outer-circumference-side thread groove portion engraved on an opposite surface of an outer circumference side stator opposed to a rotor cylinder portion and an inner-circumference-side thread groove portion engraved on an opposite surface of an inner circumference side stator opposed to the rotor cylinder portion.
Inventors:
Yuyuki Sakaguchi
Akihiko Wada
Takeshi Kabazawa
Akihiko Wada
Takeshi Kabazawa
Application Number:
JP2015539045A
Publication Date:
November 20, 2019
Filing Date:
September 01, 2014
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04D19/04
Domestic Patent References:
| JP4006593U | ||||
| JP2003172289A | ||||
| JP5038389U | ||||
| JP2003028090A | ||||
| JP5042695U | ||||
| JP2003065281A |
Foreign References:
| WO2012043035A1 |
Attorney, Agent or Firm:
Takamitsu Shimizu