Title:
気体バラスト装置を有する真空ポンプ
Document Type and Number:
Japanese Patent JP3611574
Kind Code:
B2
Abstract:
PCT No. PCT/EP94/01678 Sec. 371 Date Jan. 29, 1996 Sec. 102(e) Date Jan. 29, 1996 PCT Filed May 26, 1994 PCT Pub. No. WO95/04223 PCT Pub. Date Feb. 9, 1995The invention pertains to a vacuum pump (1) with a closable line (63, 102) through which gas ballast can be fed into the pump chamber (8, 9); to eliminate the danger that a recipient hooked up to the vacuum pump may be charged with air in the event of a pump failure, the invention proposes that the line be equipped with a control valve (59, 60, 61; 98, 99; 109, 110) to regulate the gas ballast feed as a function of operating conditions, such that the line is closed in the event of a pump failure.
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Inventors:
Abelen, Thomas
Lutz, Arnto
Muller, peter
Lutz, Arnto
Muller, peter
Application Number:
JP50550895A
Publication Date:
January 19, 2005
Filing Date:
May 26, 1994
Export Citation:
Assignee:
Leibold Actien Gezel Shaft
International Classes:
F04C27/02; F04C25/02; F04C28/28; F04C29/02; (IPC1-7): F04C25/02
Domestic Patent References:
| JP21512Y2 |
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Reinhard Einsel
Toshiomi Yamazaki
Takuya Kuno
Reinhard Einsel
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