Title:
真空シール、ダブルシール、真空システム及び真空ポンプ
Document Type and Number:
Japanese Patent JP6546247
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an improved vacuum seal enabling reliable sealing even in a case of extremely low vacuum pressure, especially even in a case of pressure of less than 10mba.SOLUTION: A vacuum seal is configured to seal a connection part between two seal surfaces, especially between flanges, more especially between an outlet flange of a recipient and an inlet flange of a vacuum pump, especially a turbo-molecular pump. The vacuum seal includes a ring-shaped metal body. In the metal body, a shell composed of a non-metal material is arranged.SELECTED DRAWING: Figure 8
Inventors:
Martin Rose
Tobias Stol
Michael Schweighoefer
Jan Hoffman
Tobias Stol
Michael Schweighoefer
Jan Hoffman
Application Number:
JP2017212447A
Publication Date:
July 17, 2019
Filing Date:
November 02, 2017
Export Citation:
Assignee:
Pfeiffer Vacuum Game Behr
International Classes:
F16J15/08; F04B37/16; F04D19/04
Domestic Patent References:
| JP2016023805A | ||||
| JP8145183A | ||||
| JP2008291989A | ||||
| JP2007009970A |
Attorney, Agent or Firm:
Mitsufumi Esaki
Blacksmith
Atsushi Shinohara
Shinsuke Nakamura
Blacksmith
Atsushi Shinohara
Shinsuke Nakamura