Title:
真空調圧用バルブ
Document Type and Number:
Japanese Patent JP4171900
Kind Code:
B2
Abstract:
An annular valve seat is formed in a connecting path connecting a first main port and a second main port, a circular flow path wall having a diameter greater than a seat diameter is formed around the valve seat so as to surround the valve seat, a circular outer peripheral wall having a diameter greater than the seat diameter and smaller than a diameter of the flow path wall is formed at a disc-shaped valve member, and a restricted flow path is formed between the flow path wall and the outer peripheral wall when the valve member is fitted in the flow path wall.
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Inventors:
Kajiya Masao
Application Number:
JP2003140858A
Publication Date:
October 29, 2008
Filing Date:
May 19, 2003
Export Citation:
Assignee:
SMC Corporation
International Classes:
F16K51/02; F16K1/36; F16K31/122; F16K41/10; G05D16/10
Domestic Patent References:
| JP6288493A | ||||
| JP2001146984A | ||||
| JP55005815Y1 | ||||
| JP2002286162A | ||||
| JP59140967A | ||||
| JP54138025U | ||||
| JP47015719A | ||||
| JP7201758A | ||||
| JP2000163136A | ||||
| JP3505907A | ||||
| JP50022219U | ||||
| JP11051514A | ||||
| JP40028314B1 | ||||
| JP56095650U | ||||
| JP2186171A |
Foreign References:
| WO2002012766A1 |
Attorney, Agent or Firm:
Hiroshi Hayashi
Hayashi Naoki
Kotaro Hori
Hayashi Naoki
Kotaro Hori