Title:
VAPORIZER
Document Type and Number:
Japanese Patent JP2023057341
Kind Code:
A
Abstract:
To provide a vaporizer that causes a vaporized raw material, which has suddenly expanded by vaporization, to be smoothly discharged, preventing the inner pressure of a flow path from rising, which allows for quick processing of liquid raw material in larger volumes than in the conventional art.SOLUTION: A vaporizer A comprises a liquid-raw-material introduction opening 11, a vaporized-raw-material discharge opening 21, a vaporizer body 1, and a heater 5. The vaporizer body 1 is internally equipped with a vaporization unit 3 extending from the liquid-raw-material introduction opening 11 to the vaporized-raw-material discharge opening 21. A flow path 7 into which a liquid raw material L flows is formed in the vaporization unit 3. The flow path 7 has its flow path area S to increase as it goes from the liquid-raw-material introduction opening 11 to the vaporized-raw-material discharge opening 21.SELECTED DRAWING: Figure 1
Inventors:
ONO HIROFUMI
Application Number:
JP2021166820A
Publication Date:
April 21, 2023
Filing Date:
October 11, 2021
Export Citation:
Assignee:
LINTEC CO LTD
International Classes:
C23C16/448; B01J7/00; H01L21/205; H01L21/31
Domestic Patent References:
| JPH1187327A | 1999-03-30 | |||
| JP2001011634A | 2001-01-16 | |||
| JPH06316765A | 1994-11-15 | |||
| JP2006503178A | 2006-01-26 | |||
| JPH1074745A | 1998-03-17 | |||
| JP2005109349A | 2005-04-21 | |||
| JP2010003976A | 2010-01-07 | |||
| JP2006089780A | 2006-04-06 |
Foreign References:
| WO2020213104A1 | 2020-10-22 |
Attorney, Agent or Firm:
Yoshiaki Mori
Maki Ichikawa
Maki Ichikawa