Title:
フォトリソグラフィ・パターン形成による可変コンデンサとその製造方法
Document Type and Number:
Japanese Patent JP2004512671
Kind Code:
A
Abstract:
A new type of high-Q variable capacitor includes a substrate, a first electrically conductive layer fixed to the substrate, a dielectric layer fixed to a portion of the electrically conductive layer, and a second electrically conductive layer having an anchor portion and a free portion. The anchor portion is fixed to the dielectric layer and the free portion is initially fixed to the dielectric layer, but is released from the dielectric layer to become separated from the dielectric layer, and wherein an inherent stress profile in the second electrically conductive layer biases the free portion away from the dielectric layer. When a bias voltage is applied between the first electrically conductive layer and the second electrically conductive layer, electrostatic forces in the free portion bend the free portion towards the first electrically conductive layer, thereby increasing the capacitance of the capacitor.
Inventors:
Chua Christopher El
Peters Eric
Van Schlierenberg Cohenrad F
Smith Donald El
Peters Eric
Van Schlierenberg Cohenrad F
Smith Donald El
Application Number:
JP2001584440A
Publication Date:
April 22, 2004
Filing Date:
May 10, 2001
Export Citation:
Assignee:
XEROX CORPORATION
International Classes:
H01G17/00; H01G5/16; H01G7/00; (IPC1-7): H01G7/00; H01G17/00
Domestic Patent References:
| JPH10189393A | 1998-07-21 | |||
| JP2000100659A | 2000-04-07 | |||
| JP64048138B | ||||
| JPH08255546A | 1996-10-01 | |||
| JPH1079324A | 1998-03-24 | |||
| JPH0821967A | 1996-01-23 | |||
| JPH10334778A | 1998-12-18 | |||
| JPS6348138B2 | 1988-09-27 | |||
| JPH1056186A | 1998-02-24 | |||
| JP2000021282A | 2000-01-21 | |||
| JPH1012123A | 1998-01-16 | |||
| JPH07202278A | 1995-08-04 |
Attorney, Agent or Firm:
Kenji Yoshida
Jun Ishida
Jun Ishida