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Title:
フォトリソグラフィ・パターン形成による可変コンデンサとその製造方法
Document Type and Number:
Japanese Patent JP4980539
Kind Code:
B2
Abstract:
A new type of high-Q variable capacitor includes a substrate, a first electrically conductive layer fixed to the substrate, a dielectric layer fixed to a portion of the electrically conductive layer, and a second electrically conductive layer having an anchor portion and a free portion. The anchor portion is fixed to the dielectric layer and the free portion is initially fixed to the dielectric layer, but is released from the dielectric layer to become separated from the dielectric layer, and wherein an inherent stress profile in the second electrically conductive layer biases the free portion away from the dielectric layer. When a bias voltage is applied between the first electrically conductive layer and the second electrically conductive layer, electrostatic forces in the free portion bend the free portion towards the first electrically conductive layer, thereby increasing the capacitance of the capacitor.

Inventors:
Chua Christopher El
Peters Eric
Van Schlierenberg Cohenrad F
Smith Donald El
Application Number:
JP2001584440A
Publication Date:
July 18, 2012
Filing Date:
May 10, 2001
Export Citation:
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Assignee:
XEROX CORPORATION
International Classes:
H01G5/16; H01G17/00; H01G7/00
Domestic Patent References:
JP10334778A
JP10079324A
JP63048138B1
JP10056186A
JP8021967A
JP11506829A
JP8255546A
JP6086325U
JP10189393A
JP2000100659A
JP2000021282A
JP10012123A
JP7202278A
Attorney, Agent or Firm:
Kenji Yoshida
Jun Ishida



 
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