Title:
A vibration body, its manufacturing method, and a vibrated type drive
Document Type and Number:
Japanese Patent JP6184182
Kind Code:
B2
Abstract:
A vibrating body includes a substrate, a piezoelectric element comprising a piezoelectric layer and electrode layers and joined to the substrate, and a ceramic layer between the substrate and the piezoelectric element. The ceramic layer comprises a first region and a second region which is adjacent to the first region in a direction perpendicular to a thickness direction of the ceramic layer. The first region has a square shape, each side of the first region having a length equal to a thickness of the ceramic layer, the second region has a square shape, each side of the second region having the length equal to the thickness of the ceramic layer, and a difference between a porosity of the first region and a porosity of the second region is not greater than 15%.
Inventors:
Yutaka Maruyama
Masahiro Harada
Yosuke Igarashi
Yasuhiro Tsubota
Ono Junsaburo
Yasuhiro Ogawa
Masahiro Harada
Yosuke Igarashi
Yasuhiro Tsubota
Ono Junsaburo
Yasuhiro Ogawa
Application Number:
JP2013124414A
Publication Date:
August 23, 2017
Filing Date:
June 13, 2013
Export Citation:
Assignee:
Canon Inc
Daiken Chemical Manufacturing and Sales Co., Ltd.
Nippon Horo Glaze Co., Ltd.
Daiken Chemical Manufacturing and Sales Co., Ltd.
Nippon Horo Glaze Co., Ltd.
International Classes:
H02N2/00; H01L41/053; H01L41/09
Domestic Patent References:
| JP2011045869A | ||||
| JP11322459A | ||||
| JP2005327512A | ||||
| JP2006024557A | ||||
| JP11128639A | ||||
| JP2008546206A | ||||
| JP2006518934A | ||||
| JP2004142350A | ||||
| JP2003069104A |
Attorney, Agent or Firm:
Okabe
Shinichi Usui
Takao Ochi
Seiichiro Takahashi
Koji Yoshizawa
Masami Saito
Katsuhiko Kimura
Naofumi Tanaka
Shinichi Usui
Takao Ochi
Seiichiro Takahashi
Koji Yoshizawa
Masami Saito
Katsuhiko Kimura
Naofumi Tanaka