Title:
ウェーハ研削方法及びウェーハ研削装置
Document Type and Number:
Japanese Patent JP6624512
Kind Code:
B2
Inventors:
Yuusuke Kaneshiro
Application Number:
JP2016063551A
Publication Date:
December 25, 2019
Filing Date:
March 28, 2016
Export Citation:
Assignee:
Tokyo Seimitsu Co., Ltd.
International Classes:
H01L21/304; B24B7/22; B24B49/12; H01L21/301
Domestic Patent References:
| JP2003017442A | ||||
| JP2012121085A |
Attorney, Agent or Firm:
Kenzo Matsuura