Title:
水溶性感光性ポリイミドポリマー、その製造方法及びそれを含有するフォトレジスト組成物
Document Type and Number:
Japanese Patent JP5009953
Kind Code:
B2
Inventors:
Wang Jin
Katsuhiko Miko
Moriyasu
Source of yellow
Katsuhiko Miko
Moriyasu
Source of yellow
Application Number:
JP2009111789A
Publication Date:
August 29, 2012
Filing Date:
May 01, 2009
Export Citation:
Assignee:
Changchun Artificial Resin Factory Co., Ltd.
International Classes:
C08G73/10; G03F7/027
Domestic Patent References:
| JP11271973A | ||||
| JP2006342355A | ||||
| JP11282160A | ||||
| JP2000147761A | ||||
| JP2004325980A | ||||
| JP10265571A | ||||
| JP2007314647A |
Attorney, Agent or Firm:
Seishiro Suzuki