Title:
A wiring board, an infrared sensor, and a penetration electrode formation method
Document Type and Number:
Japanese Patent JP6028887
Kind Code:
B2
Inventors:
Tsuyoshi Yoda
Application Number:
JP2011130987A
Publication Date:
November 24, 2016
Filing Date:
June 13, 2011
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H01L21/3205; H01L21/768; H01L23/522; H01L27/144; H01L27/146
Domestic Patent References:
| JP2009129953A | ||||
| JP2005243689A | ||||
| JP2010251791A | ||||
| JP2008251964A | ||||
| JP2007123857A | ||||
| JP2004200547A | ||||
| JP2007516589A |
Attorney, Agent or Firm:
Kazuaki Watanabe
Keisuke Nishida
Satoshi Nakai
Osamu Suzawa
Keisuke Nishida
Satoshi Nakai
Osamu Suzawa
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