Title:
【発明の名称】圧力ゲージ出力の零点調整装置
Document Type and Number:
Japanese Patent JP2951718
Kind Code:
B2
Abstract:
A pressure gage detects a pressure in a vacuum-processing container as an electrical signal. A pressure detection signal from the pressure gage includes an error over time. An error detecting unit detects a signal representing the error which is output from the pressure gage while the vacuum-processing container is set at a predetermined calibration pressure. A correction value calculating unit calculates, in accordance with the signal representing the error which is detected by the error detecting unit, a signal representing a correction value used in order to cancel the signal representing the error. A correcting unit adds the pressure detection signal from the pressure gage to the signal representing the correction value which is calculated by the correction value calculating unit while an instruction for setting an interior of the vacuum-processing container at a desired pressure value is output, thereby eliminating the error over time which is included in the pressure detection signal. A pressure controlling unit controls the interior of the vacuum-processing container at the desired pressure value in accordance with an output signal from which the error over time has been eliminated by the correcting unit.
Inventors:
YOKOTA TAKASHI
KAMIKANDA OSAMU
KAMIKANDA OSAMU
Application Number:
JP33131990A
Publication Date:
September 20, 1999
Filing Date:
November 28, 1990
Export Citation:
Assignee:
TOKYO EREKUTORON KK
International Classes:
G01L9/04; G01L19/02; G01L27/00; G05D16/20; H01J37/32; (IPC1-7): G01L19/02
Attorney, Agent or Firm:
Hajime Inoue (1 person outside)