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Title:
A zipper and a processing unit
Document Type and Number:
Japanese Patent JP6168384
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a chuck which can fix and release a processed object easily.SOLUTION: A chuck 23 holds and fixes an elongated member as a processed object 10. The chuck 23 has a spring 55 and can switch from a state where the processed object 10 can be fixed by an elastic force (fig. 5(a)) by applying a force to the spring 55 and deforming the spring 55, to a state where an elastic force is not applied to the processed object 10 (fig. 5(b)). The chuck 23 may be employed in an exposure device for irradiating the processed object with light, for example.

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Inventors:
Norihiro Ota
Application Number:
JP2012289142A
Publication Date:
July 26, 2017
Filing Date:
December 28, 2012
Export Citation:
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Assignee:
Nidec Read Corporation
International Classes:
H01L21/027; C25D1/00
Domestic Patent References:
JP2002052085A
JP2002178188A
JP4572303B2
Attorney, Agent or Firm:
Naomi Katsura River