Title:
2-D MEMS TRIBOMETER WITH COMB DRIVES
Document Type and Number:
WIPO Patent Application WO/2011/137451
Kind Code:
A3
Abstract:
A microelectromechanical (MEMS) nanoindenter transducer including a body, a probe coupled to and moveable relative to the body, the probe holding a removeable indenter tip, a first micromachined comb drive and a second micromachined comb drive. The first micromachined comb drive includes an actuator comprising a plurality of electrostatic capacitive actuators configured to drive the probe along a first axis, including in an indentation direction, in response to an applied bias voltage, and a displacement sensor comprising a plurality of differential capacitive sensors having capacitance levels which together are representative of a position of the probe relative to the first axis. The second micromachined comb drive includes an actuator comprising a plurality of electrostatic capacitive actuators configured to drive the probe along a second axis, which is perpendicular to the first axis, in response to an applied bias voltage, and a displacement sensor comprising a plurality of differential capacitive sensors having capacitance levels which together are representative of a position of the probe relative to the second axis. Each of the electrostatic capacitive actuators and the differential capacitive sensors comprises an electrode comb pair, each electrode comb pair including a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe.
Inventors:
OH YUNJE (US)
SYED ASIF SYED AMANULA (US)
ODEN WARREN (US)
SYED ASIF SYED AMANULA (US)
ODEN WARREN (US)
Application Number:
PCT/US2011/034835
Publication Date:
September 27, 2012
Filing Date:
May 02, 2011
Export Citation:
Assignee:
HYSITRON INC (US)
OH YUNJE (US)
SYED ASIF SYED AMANULA (US)
ODEN WARREN (US)
OH YUNJE (US)
SYED ASIF SYED AMANULA (US)
ODEN WARREN (US)
International Classes:
G01N3/40
Domestic Patent References:
| WO2010003149A1 | 2010-01-07 |
Other References:
DESAI A V ET AL: "A novel MEMS nano-tribometer for dynamic testing in-situ in SEM and TEM", TRIBOLOGY LETTERS, BALTZER SCIENCE PUBLISHIERS, NL, vol. 18, no. 1, 1 January 2005 (2005-01-01), pages 13 - 19, XP002550407, ISSN: 1023-8883, DOI: 10.1007/S11249-004-1700-Z
Attorney, Agent or Firm:
DICKE, Steven E. et al. (BILLIG & CZAJA PLLC,100 S. Fifth Street,Suite 225, Minneapolis Minnesota, US)
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