Title:
TRANSLATING/TURNING 2-DEGREE-OF-FREEDOM STAGE DEVICE AND 3-DEGREE-OF-FREEDOM STAGE DEVICE USING THE SAME
Document Type and Number:
WIPO Patent Application WO/2007/004413
Kind Code:
A1
Abstract:
A translating/turning 2-degree-of-freedom stage device capable of finely
positioning a table with respect to Y and θ and movable through a long stroke
for transportation. The stage device comprises at least two sets (6a, 6b) of uniaxial
driving and translating/turning mechanism formed of two translating freedom
degree parts with translating freedom degrees, one turning freedom degree part
with turning freedom degrees, and a motor and a uniaxial driving and translating/turning
mechanism formed of a motor controller, and a second mechanism part (16) with
one turning freedom degree and one translating freedom degree. Thus, the stage
device can perform a translating movement in the Y-direction and a turning by
an angle of θ.
Inventors:
KOMIYA, Takehiko (Kurosaki-shiroishi Yahatanishi-k, Kitakyushu-shi Fukuoka 04, 8060004, JP)
小宮 剛彦 (〒04 福岡県北九州市八幡西区黒崎城石２番１号 株式会社安川電機内 Fukuoka, 8060004, JP)
小宮 剛彦 (〒04 福岡県北九州市八幡西区黒崎城石２番１号 株式会社安川電機内 Fukuoka, 8060004, JP)
Application Number:
JP2006/312230
Publication Date:
January 11, 2007
Filing Date:
June 19, 2006
Export Citation:
Assignee:
KABUSHIKI KAISHA YASKAWA DENKI (2-1 Kurosaki-shiroishi, Yahatanishi-ku Kitakyushu-shi, Fukuoka 04, 8060004, JP)
株式会社安川電機 (〒04 福岡県北九州市八幡西区黒崎城石２番１号 Fukuoka, 8060004, JP)
KOMIYA, Takehiko (Kurosaki-shiroishi Yahatanishi-k, Kitakyushu-shi Fukuoka 04, 8060004, JP)
株式会社安川電機 (〒04 福岡県北九州市八幡西区黒崎城石２番１号 Fukuoka, 8060004, JP)
KOMIYA, Takehiko (Kurosaki-shiroishi Yahatanishi-k, Kitakyushu-shi Fukuoka 04, 8060004, JP)
International Classes:
B23Q1/48; G12B5/00; H01L21/027; H01L21/68