Title:
3-AXIS MAGNETIC SENSOR AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2006/098431
Kind Code:
A1
Abstract:
A 3-axis magnetic sensor includes a magnetoresistive element formed by a plurality of magnetoresistive element bars connected in series by a bias magnet. The magnetoresistive element of the X-axis sensor and the magnetoresistive element of the Y-axis sensor are formed on a plane parallel to the surface of the substrate. The magnetization sensitivity direction vertical to the longitudinal direction of each of the magnetoresistive element bars. The magnetization direction of the magnetoresistive element of the X-axis sensor orthogonally intersects that of the magnetoresistive element of the Y-axis sensor. Furthermore, the magnetoresistive element of the Z-axis sensor is formed on the inclined surface of the protrusion protruding from the surface of the substrate and its magnetization direction is in the inclined surface. The magnetization sensitivity direction of the Z-axis sensor is vertical to the longitudinal direction of the magnetoresistive element bar.
Inventors:
Sato, Hideki c/o YAMAHA CORPORATION (10-1 Nakazawa-cho, Naka-ku, Hamamatsu-sh, Shizuoka ., 430-8650, JP)
Omura, Masayoshi c/o YAMAHA CORPORATION (10-1 Nakazawa-cho, Naka-ku, Hamamatsu-sh, Shizuoka ., 430-8650, JP)
Naito, Hiroshi c/o Yamaha Kagoshima Semiconductor Inc. (1800 Kitakata, Yuusui-cho, Aira-gu, Kagoshima 02, 89962, JP)
Oohashi, Toshiyuki c/o YAMAHA CORPORATION (10-1 Nakazawa-cho, Naka-ku, Hamamatsu-sh, Shizuoka ., 430-8650, JP)
Wakui, Yukio c/o YAMAHA CORPORATION (10-1 Nakazawa-cho, Naka-ku, Hamamatsu-sh, Shizuoka ., 430-8650, JP)
Osuga, Chihiro c/o YAMAHA CORPORATION (10-1 Nakazawa-cho, Naka-ku, Hamamatsu-sh, Shizuoka ., 430-8650, JP)
Omura, Masayoshi c/o YAMAHA CORPORATION (10-1 Nakazawa-cho, Naka-ku, Hamamatsu-sh, Shizuoka ., 430-8650, JP)
Naito, Hiroshi c/o Yamaha Kagoshima Semiconductor Inc. (1800 Kitakata, Yuusui-cho, Aira-gu, Kagoshima 02, 89962, JP)
Oohashi, Toshiyuki c/o YAMAHA CORPORATION (10-1 Nakazawa-cho, Naka-ku, Hamamatsu-sh, Shizuoka ., 430-8650, JP)
Wakui, Yukio c/o YAMAHA CORPORATION (10-1 Nakazawa-cho, Naka-ku, Hamamatsu-sh, Shizuoka ., 430-8650, JP)
Osuga, Chihiro c/o YAMAHA CORPORATION (10-1 Nakazawa-cho, Naka-ku, Hamamatsu-sh, Shizuoka ., 430-8650, JP)
Application Number:
PCT/JP2006/305399
Publication Date:
September 21, 2006
Filing Date:
March 17, 2006
Export Citation:
Assignee:
YAMAHA CORPORATION (10-1, Nakazawa-cho Naka-ku, Hamamatsu-sh, Shizuoka, 430-8650, JP)
Sato, Hideki c/o YAMAHA CORPORATION (10-1 Nakazawa-cho, Naka-ku, Hamamatsu-sh, Shizuoka, 430-8650, JP)
Omura, Masayoshi c/o YAMAHA CORPORATION (10-1 Nakazawa-cho, Naka-ku, Hamamatsu-sh, Shizuoka, 430-8650, JP)
Naito, Hiroshi c/o Yamaha Kagoshima Semiconductor Inc. (1800 Kitakata, Yuusui-cho, Aira-gu, Kagoshima 02, 89962, JP)
Oohashi, Toshiyuki c/o YAMAHA CORPORATION (10-1 Nakazawa-cho, Naka-ku, Hamamatsu-sh, Shizuoka, 430-8650, JP)
Wakui, Yukio c/o YAMAHA CORPORATION (10-1 Nakazawa-cho, Naka-ku, Hamamatsu-sh, Shizuoka, 430-8650, JP)
Osuga, Chihiro c/o YAMAHA CORPORATION (10-1 Nakazawa-cho, Naka-ku, Hamamatsu-sh, Shizuoka, 430-8650, JP)
Sato, Hideki c/o YAMAHA CORPORATION (10-1 Nakazawa-cho, Naka-ku, Hamamatsu-sh, Shizuoka, 430-8650, JP)
Omura, Masayoshi c/o YAMAHA CORPORATION (10-1 Nakazawa-cho, Naka-ku, Hamamatsu-sh, Shizuoka, 430-8650, JP)
Naito, Hiroshi c/o Yamaha Kagoshima Semiconductor Inc. (1800 Kitakata, Yuusui-cho, Aira-gu, Kagoshima 02, 89962, JP)
Oohashi, Toshiyuki c/o YAMAHA CORPORATION (10-1 Nakazawa-cho, Naka-ku, Hamamatsu-sh, Shizuoka, 430-8650, JP)
Wakui, Yukio c/o YAMAHA CORPORATION (10-1 Nakazawa-cho, Naka-ku, Hamamatsu-sh, Shizuoka, 430-8650, JP)
Osuga, Chihiro c/o YAMAHA CORPORATION (10-1 Nakazawa-cho, Naka-ku, Hamamatsu-sh, Shizuoka, 430-8650, JP)
International Classes:
G01R33/09; H01L43/12
Attorney, Agent or Firm:
Shiga, Masatake (2-3-1, Yaesu Chuo-ku, Tokyo, 104-8453, JP)