Title:
ABNORMAL CONDITION DETECTOR IN A LASER OSCILLATOR CONDUIT SYSTEM
Document Type and Number:
WIPO Patent Application WO/1988/007275
Kind Code:
A1
Abstract:
The conduit system of a laser oscillator (1) includes medium gas circulation pipes (211, 212, 213, 214) for circulating a medium gas to a laser discharge tube (11), a medium gas circulation pump (23) provided in the medium gas circulation pipes, medium gas supply pipes (217, 218) for supplying the medium gas to the medium gas circulation pipes, a medium gas discharge pump (24) driven by a drive unit to discharge the medium gas from the laser discharge tube and the medium gas circulation pipes, and a controller (7) for controlling the operation of said conduit system and for generating signals for said pump drive unit and a display device (6). When a switch valve (26) in the medium gas pipe is closed and the discharge pump (24) is driven, any abnormal condition in the conduit system may be detected and displayed based upon whether the operation signal of a pressure sensor (3) is generated within a predetermined period of time or not.
Inventors:
YAMAZAKI ETSUO (JP)
IEHISA NOBUAKI (JP)
IEHISA NOBUAKI (JP)
Application Number:
PCT/JP1988/000171
Publication Date:
September 22, 1988
Filing Date:
February 19, 1988
Export Citation:
Assignee:
FANUC LTD (JP)
International Classes:
H01S3/036; H01S3/134; (IPC1-7): H01S3/134
Foreign References:
| JPS55160483A | 1980-12-13 | |||
| JPS55145068U | 1980-10-17 | |||
| JPS57146356U | 1982-09-14 | |||
| JPH0641276A | 1994-02-15 | |||
| JPH0652081A | 1994-02-25 | |||
| JPS62282478A | 1987-12-08 |
Other References:
See also references of EP 0310670A4
Download PDF:
Previous Patent: LASER OSCILLATOR CONTROL CIRCUIT
Next Patent: DEVICE FOR CONTROLLING WAVELENGTH OF LASER BEAM
Next Patent: DEVICE FOR CONTROLLING WAVELENGTH OF LASER BEAM