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Title:
ABNORMALITY DIAGNOSIS METHOD OF FLUID SUPPLY LINE
Document Type and Number:
WIPO Patent Application WO/2019/106959
Kind Code:
A1
Abstract:
[Problem] To diagnose an abnormality of a fluid control device from the overall operation of a fluid supply line configured by a plurality of fluid control devices. [Solution] A method for diagnosing an abnormality of a fluid supply line comprising a plurality of fluid control devices F, V1, V2 that are in fluid-tight communication has: a valve operating step for opening and closing one or a plurality of valves of a valve FV, a valve V1, and a valve V2 within the flow control device; a pressure adjusting step for setting to a vacuum state or a pressurized state a portion or the entirety within flow paths R1, Rs reaching from the valve V1 to the valve V2 via the flow control device; a pressure detection step for acquiring pressure characteristics over time within the flow path of a flow control device F using pressure detection mechanisms P1, P2; and an abnormality determining step for determining the presence or absence of an abnormality by comparing pressure characteristics during the abnormality diagnosis acquired using the pressure detection mechanisms P1, P2, and the pressure characteristics when normal, measured in advance under the same conditions.

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Inventors:
TANNO Ryutaro (2-3-2 Itachibori, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
AIKAWA Kenji (2-3-2 Itachibori, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
HARADA Akihiro (2-3-2 Itachibori, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
SUZUKI Yuya (2-3-2 Itachibori, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
MATSUDA Takahiro (2-3-2 Itachibori, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
KOMEHANA Katsunori (2-3-2 Itachibori, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
OCHIISHI Masahiko (2-3-2 Itachibori, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
SHINOHARA Tsutomu (2-3-2 Itachibori, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
Application Number:
JP2018/037416
Publication Date:
June 06, 2019
Filing Date:
October 05, 2018
Export Citation:
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Assignee:
FUJIKIN INCORPORATED (2-3-2, Itachibori Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
International Classes:
G05D7/06; F16K37/00
Foreign References:
JP2013083282A2013-05-09
JP2003529218A2003-09-30
JP2015152512A2015-08-24
Attorney, Agent or Firm:
KASUKAWA Toshio (Modmarche-shibuyasakuragaoka 4th FL, 10-4 Sakuragaoka-cho, Shibuya-k, Tokyo 31, 〒1500031, JP)
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