Title:
ABNORMALITY DIAGNOSIS METHOD OF PROCESSING DEVICE AND ABNORMALITY DIAGNOSIS SYSTEM OF SAME
Document Type and Number:
WIPO Patent Application WO/2012/099206
Kind Code:
A1
Abstract:
Disclosed is an abnormality diagnosis method of a processing device, including: a determination data creation step (M2) of determining whether or not time-series data fluctuating over time collected from a signal output by a sensor monitoring a processing process placed in a processing device processing a subject to be processed is consistent with a plurality of determination conditions, and creating determination data configured from combination of the determination results; a diagnosis step (M3) of collating the determination data with model data previously set on the basis of a fluctuation trend peculiar to the time-series data causing for each abnormal cause and corresponding to the determination data, and estimating an abnormal cause; and a first re-diagnosis step (M6) of changing the model data to perform collation when the collation in the step (M3) is inconsistent.
Inventors:
KOZAWA SEIJI (JP)
NAKAMURA NAOTO (JP)
NAKAMURA NAOTO (JP)
Application Number:
PCT/JP2012/051085
Publication Date:
July 26, 2012
Filing Date:
January 19, 2012
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
KOZAWA SEIJI (JP)
NAKAMURA NAOTO (JP)
KOZAWA SEIJI (JP)
NAKAMURA NAOTO (JP)
International Classes:
H01L21/02; G05B23/02
Foreign References:
| JP2008177534A | 2008-07-31 | |||
| JP2005251925A | 2005-09-15 | |||
| JP2005197323A | 2005-07-21 | |||
| JP2003100825A | 2003-04-04 |
Attorney, Agent or Firm:
KATSUNUMA Hirohito et al. (JP)
Katsunuma Hirohito (JP)
Katsunuma Hirohito (JP)
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Claims: