Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
ABRASIVE CLOTH, POLISHING DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2002/031874
Kind Code:
A1
Abstract:
An abrasive cloth having an abrasive layer containing a polymer material which is hydrolyzed by an aqueous medium. The abrasive cloth is capable of exhibiting stable polishing performance for a relatively long period of time with no dressing treatment.

Inventors:
Hirabayashi, Hideaki (201 Kyasuteru-Konandai 36-15, Motoohashi 1-chome Sakae-ku Yokohama-shi, Kanagawa, 247-0011, JP)
Saito, Akiko (B501, Kureare-Toshiba-Nakadai 33-12 Higashiteraonakadai Tsurumi-k, Yokohama-shi Kanagawa, 230-0017, JP)
Sakurai, Naoaki (25-1, Hino 4-chome Konan-ku Yokohama-shi, Kanagawa, 234-0051, JP)
Oshibe, Yoshihiro (1-18, Kanokoda Taketoyocho Chita-gun, Aichi, 470-2302, JP)
Ishidoya, Masahiro (5-9-5, Nango Chigasaki-shi, Kanagawa, 253-0061, JP)
Application Number:
PCT/JP2001/008717
Publication Date:
April 18, 2002
Filing Date:
October 03, 2001
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
KABUSHIKI KAISHA TOSHIBA (1-1 Shibaura 1-chome Minato-ku, Tokyo, Tokyo, 105-8001, JP)
NOF CORPORATION (20-3, Ebisu 4-chome Shibuya-ku, Tokyo, 150-6019, JP)
Hirabayashi, Hideaki (201 Kyasuteru-Konandai 36-15, Motoohashi 1-chome Sakae-ku Yokohama-shi, Kanagawa, 247-0011, JP)
Saito, Akiko (B501, Kureare-Toshiba-Nakadai 33-12 Higashiteraonakadai Tsurumi-k, Yokohama-shi Kanagawa, 230-0017, JP)
Sakurai, Naoaki (25-1, Hino 4-chome Konan-ku Yokohama-shi, Kanagawa, 234-0051, JP)
Oshibe, Yoshihiro (1-18, Kanokoda Taketoyocho Chita-gun, Aichi, 470-2302, JP)
Ishidoya, Masahiro (5-9-5, Nango Chigasaki-shi, Kanagawa, 253-0061, JP)
International Classes:
B24B37/20; B24B37/24; B24B49/16; B24D3/00; B24D3/28; B24D3/34; B24D11/00; B24D13/14; C08F20/28; C08F22/20; C08F24/00; C08F30/08; C08J5/14; C08K3/22; C08K3/36; C08L101/02; C08L101/14; H01L21/304; (IPC1-7): H01L21/304; B24B37/00
Foreign References:
JP2000033552A
JP2000034416A
JPH03277465A
US5976000A
Other References:
See also references of EP 1326267A1
Attorney, Agent or Firm:
Suzuye, Takehiko c/o SUZUYE & SUZUYE 7-2 (Kasumigaseki 3-chome Chiyoda-ku, Tokyo, 100-0013, JP)
Download PDF: