Title:
ABRASIVE COMPOSITION AND METHOD FOR ADJUSTING ABRASION RATE
Document Type and Number:
WIPO Patent Application WO/2019/131762
Kind Code:
A1
Abstract:
This abrasive composition for abrading a resin and copper or a copper alloy, comprises alumina abrasive grains, glycine, hydrogen peroxide water, and water.
Inventors:
MORIYAMA KAZUKI (JP)
Application Number:
PCT/JP2018/047847
Publication Date:
July 04, 2019
Filing Date:
December 26, 2018
Export Citation:
Assignee:
NITTA HAAS INC (JP)
International Classes:
C09K3/14; B24B37/00; H01L21/304; H05K3/26
Foreign References:
| JP2009129977A | 2009-06-11 | |||
| JP2005268666A | 2005-09-29 | |||
| JP2015528031A | 2015-09-24 | |||
| JP2015090922A | 2015-05-11 | |||
| JP2002164308A | 2002-06-07 |
Attorney, Agent or Firm:
FUJIMOTO & PARTNERS (JP)
Download PDF:
Previous Patent: ABRASIVE COMPOSITION
Next Patent: DISPLAY PROCESSING DEVICE AND DISPLAY CONTROL DEVICE
Next Patent: DISPLAY PROCESSING DEVICE AND DISPLAY CONTROL DEVICE