ABRASIVE FOAM SHEET AND PRODUCTION METHOD THEREOF

Title:

ABRASIVE FOAM SHEET AND PRODUCTION METHOD THEREOF

Document Type and Number:

WIPO Patent Application WO/2002/090049

Kind Code:

A1

Abstract:

A foaming paint of foaming resin is applied onto a surface of an excipient film (11), and this foaming paint is wet-foamed so as to form a foam sheet (10) on the surface of the excipient film. The foam sheet is peeled off from the surface of the excipient film, so that an abrasive surface (12) having a shape of the excipient film is formed on the surface of the foam sheet. The abrasive foam sheet thus formed and the abrasive foam sheet production method are disclosed.

More Like This:

WO/2004/058453	POLISHING PAD HAVING MULTI-WINDOWS
JP2900777	[Title of Invention] Polishing member and wafer polishing device
JPH11170166	CHEMICAL MACHINE POLISHING METHOD AND ITS DEVICE

Inventors:

HORIE YUJI (JP)
OKUYAMA HIROMITSU (JP)
HAMADA NAOYUKI (JP)

Application Number:

PCT/JP2002/001930

Publication Date:

November 14, 2002

Filing Date:

March 01, 2002

Export Citation:

Click for automatic bibliography generation Help

Assignee:

NIPPON MICRO COATING KK (JP)
HORIE YUJI (JP)
OKUYAMA HIROMITSU (JP)
HAMADA NAOYUKI (JP)

International Classes:

B24B37/20; B24B37/24; B24D3/00; B24D3/28; B24D3/32; B24D11/00; B29C41/00; B29C41/24; B29C44/00; C09D5/00; C09D175/04; B29C33/42; (IPC1-7): B24B37/00

Foreign References:

JPH10249709A	1998-09-22
JPH07108454A	1995-04-25
JPH0288229A	1990-03-28

Attorney, Agent or Firm:

Takeuchi, Sumio (Nishishinbashi 1-Chome Minato-Ku, Tokyo, JP)

Download PDF:

View/Download PDF PDF Help

Previous Patent: SURFACE GRINDING DEVICE AND METHOD

Next Patent: WAFER POLISHING METHOD AND WAFER POLISHING DEVICE