ABSORBANCE METER AND SEMICONDUCTOR MANUFACTURING DEVICE USING ABSORBANCE METER

WIPO Patent Application WO/2018/052074

A1

Through the present invention, an absorbance meter is obtained whereby a light source part or a light receiving part can be protected from heat of a sample gas without increasing the distance from the light source part to the light receiving part when measuring a high-temperature sample gas, and high measurement precision can be ensured. The present invention is provided with a sample accommodation part 10 provided with an accommodation space 11 for accommodating a sample gas, a light source part 20 for radiating light into the accommodation space 11, a light receiving part 30 for receiving light emitted from within the accommodation space 11, a first insulation zone 40a disposed adjacent to a light source part 20 side of the sample accommodation part 10 and a second insulation zone 40b disposed adjacent to a light receiving part 30 side of the sample accommodation part 10, and a first cooling part 50a disposed adjacent to the first insulation zone 40a and a second cooling part 50b disposed adjacent to the second insulation zone 40b.

JP2000181235	DEVICE AND METHOD FOR MEASURING TONER CONCENTRATION
JPH02297044	OIL DETERIORATION DETECTING DEVICE

NISHIZATO HIROSHI (JP)
MINAMI MASAKAZU (JP)
SAKAGUCHI YUHEI (JP)

PCT/JP2017/033238

March 22, 2018

September 14, 2017

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HORIBA STEC CO LTD (JP)

G01N21/59; H01L21/31; G01N21/61

JPH049642A	1992-01-14
JP2007101433A	2007-04-19
JP2007225386A	2007-09-06

NISHIMURA, Ryuhei (JP)

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