Title:
ACCELERATION DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/166771
Kind Code:
A1
Abstract:
Provided is a highly reliable acceleration sensor having little 0-point drift. For example, an acceleration sensor having a support substrate having a first direction and a second direction orthogonal thereto in a single surface, a device layer disposed on the support substrate with a space interposed therebetween and having a weight that deforms according to the application of acceleration, and a cap layer disposed on the device layer with a space interposed therebetween, wherein a fixed part fixed to the support substrate is provided in the center of the weight, a beam is provided that extends from the fixed part and makes the weight mobile by being connected thereto, a plurality of posts for coupling the support substrate and the cap layer are disposed on the fixed part, and electric signals are applied to and received from the weight via the posts.
Inventors:
JEONG HEEWON (JP)
HAYASHI MASAHIDE (JP)
YAMANAKA KIYOKO (JP)
MAEDA DAISUKE (JP)
HAYASHI MASAHIDE (JP)
YAMANAKA KIYOKO (JP)
MAEDA DAISUKE (JP)
Application Number:
PCT/JP2015/060909
Publication Date:
November 05, 2015
Filing Date:
April 08, 2015
Export Citation:
Assignee:
HITACHI AUTOMOTIVE SYSTEMS LTD (JP)
International Classes:
G01P15/08; B81B3/00; G01P15/125; H01L29/84
Foreign References:
| JP2014016175A | 2014-01-30 | |||
| JP2013217823A | 2013-10-24 | |||
| JP2012148397A | 2012-08-09 |
Other References:
See also references of EP 3139178A4
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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