Title:
ACCELERATION MEASURING DEVICE
Document Type and Number:
WIPO Patent Application WO2001002868
Kind Code:
A3
Abstract:
The invention relates to an acceleration measuring device comprising a micromechanical pendulum, a capacitive tap, and a control loop, which resets using electrostatic forces and which applies, in a time-sequential succession, a resetting voltage (U1, U2) between the pendulum and two electrodes (E1, E2) located opposite said pendulum at a distance. According to the invention, the control loop is configured in such a manner that the voltage levels (U1, U2) are set at the electrodes, whereby preventing any differential charge from flowing over the pendulum (P) thus effecting an equally large force on both sides of the pendulum, and, when the pendulum is displaced due to an acceleration, the durations of the voltage pulses applied each time are altered according to the acceleration. The difference between the durations correspond to the acceleration. The control bias (B) is essentially reduced to zero when simultaneously controlling two components in this manner. The scale factor (S) of the acceleration measuring device can be additionally controlled during a temporary change, occurring as simultaneously as possible, to the detection of the total charge as a manipulated variable.
Inventors:
HANDRICH EBERHARD (DE)
Application Number:
PCT/EP2000/005186
Publication Date:
October 17, 2002
Filing Date:
June 06, 2000
Export Citation:
Assignee:
LITEF GMBH (DE)
HANDRICH EBERHARD (DE)
HANDRICH EBERHARD (DE)
International Classes:
G01P1/00; G01P15/125; G01P15/13; (IPC1-7): G01P15/13
Foreign References:
| EP0338688A1 | 1989-10-25 | |||
| US5473946A | 1995-12-12 | |||
| US5142921A | 1992-09-01 | |||
| FR2714973A1 | 1995-07-13 | |||
| US5440939A | 1995-08-15 | |||
| US5600066A | 1997-02-04 |
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