Title:
ACCELERATION SENSOR COMPRISING DIFFERENTIAL GRAPHENE RESONANT BEAMS
Document Type and Number:
WIPO Patent Application WO/2018/205683
Kind Code:
A1
Abstract:
An acceleration sensor comprising differential graphene resonant beams. The acceleration sensor comprises a substrate (1), a sensitive mass plate (2), a first insulating layer (3), a second insulating layer (4), a first excitation electrode pair (1), a first graphene resonant beam (6), a second graphene resonant beam (7), a third insulating layer (8), a second excitation electrode pair (9), and a vacuum cover (10). A direct acceleration-sensitive mode is adopted, so that the sensitive mass block directly senses acceleration to be measured, and converts the acceleration to be measured into a concentrated force to cause axial displacement of the sensitive mass block and then to cause a change in the axial stress of the graphene resonate beams, thereby causing a change in the resonant frequency of the beams; and then by measuring the resonant frequency of the beams, acceleration can be measured. The two graphene resonant beams located in the axial direction of the sensitive mass block work in a differential mode in the direction of the acceleration to be measured. Thus, measurement signals are enhanced, the sensitivity and the measurement accuracy are improved, and conjugate interference is suppressed.
Inventors:
FAN SHANGCHUN (CN)
SHI FUTAO (CN)
XING WEIWEI (CN)
SHI FUTAO (CN)
XING WEIWEI (CN)
Application Number:
PCT/CN2018/073668
Publication Date:
November 15, 2018
Filing Date:
January 22, 2018
Export Citation:
Assignee:
UNIV BEIHANG (CN)
International Classes:
G01P15/097
Foreign References:
| CN107015025A | 2017-08-04 | |||
| CN2748921Y | 2005-12-28 | |||
| CN106771358A | 2017-05-31 | |||
| CN107255736A | 2017-10-17 | |||
| CN104374953A | 2015-02-25 | |||
| US6848307B1 | 2005-02-01 |
Other References:
CHEN, ZHIYONG ET AL.: "A Micromachined Silicon Resonant Accelerometer", CHINESE JOURNAL OF SCIENTIFIC INSTRUMENT, vol. 6, no. 30, 30 June 2009 (2009-06-30), pages 456 - 460, ISSN: 0254-3087
JIE, WENBIN ET AL.: "Acceleration Sensing Based on Graphene Resonator", PROC. SPIE 10256, SECOND INTERNATIONAL CONFERENCE ON PHOTONICS AND OPTICAL ENGINEERING, vol. 10256, 28 February 2017 (2017-02-28), pages 102562E - 1 - 10 2562E-8
JIE, WENBIN ET AL.: "Acceleration Sensing Based on Graphene Resonator", PROC. SPIE 10256, SECOND INTERNATIONAL CONFERENCE ON PHOTONICS AND OPTICAL ENGINEERING, vol. 10256, 28 February 2017 (2017-02-28), pages 102562E - 1 - 10 2562E-8
Attorney, Agent or Firm:
CO-TALENT INTELLECTUAL PROPERTY FIRM (CN)
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