Title:
ACCELERATION SENSOR, DEVICE FOR GENERATING ELECTRICITY BY VIBRATION, AND ACCELERATION SENSOR MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/001515
Kind Code:
A1
Abstract:
Provided an acceleration sensor and a device for generating electricity by vibration in which a piezoelectric layer formed on a substrate, a plurality of detection electrodes formed inside the piezoelectric layer, and the piezoelectric layer between the detection electrodes are polarized in the film thickness direction of the piezoelectric layer.
Inventors:
AOKI, Tsuyoshi (1-1 Kamikodanaka 4-chome, Nakahara-ku, Kawasaki-sh, Kanagawa 88, 〒2118588, JP)
青木 剛 (〒88 神奈川県川崎市中原区上小田中４丁目１番１号 富士通株式会社内 Kanagawa, 〒2118588, JP)
KURIHARA, Kazuaki (1-1 Kamikodanaka 4-chome, Nakahara-ku, Kawasaki-sh, Kanagawa 88, 〒2118588, JP)
青木 剛 (〒88 神奈川県川崎市中原区上小田中４丁目１番１号 富士通株式会社内 Kanagawa, 〒2118588, JP)
KURIHARA, Kazuaki (1-1 Kamikodanaka 4-chome, Nakahara-ku, Kawasaki-sh, Kanagawa 88, 〒2118588, JP)
Application Number:
JP2009/061983
Publication Date:
January 06, 2011
Filing Date:
June 30, 2009
Export Citation:
Assignee:
FUJITSU LIMITED (1-1 Kamikodanaka 4-chome, Nakahara-ku Kawasaki-sh, Kanagawa 88, 〒2118588, JP)
富士通株式会社 (〒88 神奈川県川崎市中原区上小田中４丁目１番１号 Kanagawa, 〒2118588, JP)
AOKI, Tsuyoshi (1-1 Kamikodanaka 4-chome, Nakahara-ku, Kawasaki-sh, Kanagawa 88, 〒2118588, JP)
青木 剛 (〒88 神奈川県川崎市中原区上小田中４丁目１番１号 富士通株式会社内 Kanagawa, 〒2118588, JP)
富士通株式会社 (〒88 神奈川県川崎市中原区上小田中４丁目１番１号 Kanagawa, 〒2118588, JP)
AOKI, Tsuyoshi (1-1 Kamikodanaka 4-chome, Nakahara-ku, Kawasaki-sh, Kanagawa 88, 〒2118588, JP)
青木 剛 (〒88 神奈川県川崎市中原区上小田中４丁目１番１号 富士通株式会社内 Kanagawa, 〒2118588, JP)
International Classes:
G01P15/09
Attorney, Agent or Firm:
ITOH, Tadahiko (32nd Floor, Yebisu Garden Place Tower 20-3, Ebisu 4-chome, Shibuya-k, Tokyo 32, 〒1506032, JP)
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