Title:
ACCELERATION SENSOR, DEVICE FOR GENERATING ELECTRICITY BY VIBRATION, AND ACCELERATION SENSOR MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/001515
Kind Code:
A1
Abstract:
Provided an acceleration sensor and a device for generating electricity by vibration in which a piezoelectric layer formed on a substrate, a plurality of detection electrodes formed inside the piezoelectric layer, and the piezoelectric layer between the detection electrodes are polarized in the film thickness direction of the piezoelectric layer.
Inventors:
AOKI TSUYOSHI (JP)
KURIHARA KAZUAKI (JP)
UMEMIYA SHIGEYOSHI (JP)
KURIHARA KAZUAKI (JP)
UMEMIYA SHIGEYOSHI (JP)
Application Number:
PCT/JP2009/061983
Publication Date:
January 06, 2011
Filing Date:
June 30, 2009
Export Citation:
Assignee:
FUJITSU LTD (JP)
AOKI TSUYOSHI (JP)
KURIHARA KAZUAKI (JP)
UMEMIYA SHIGEYOSHI (JP)
AOKI TSUYOSHI (JP)
KURIHARA KAZUAKI (JP)
UMEMIYA SHIGEYOSHI (JP)
International Classes:
G01P15/09; G01P15/18; H01L41/22; H01L41/257; H01L41/29
Foreign References:
| JP2007107990A | 2007-04-26 |
Attorney, Agent or Firm:
ITOH, TADAHIKO (JP)
Tadahiko Ito (JP)
Tadahiko Ito (JP)
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