ACCELERATION SENSOR AND SENSOR DEVICE

Title:

ACCELERATION SENSOR AND SENSOR DEVICE

Document Type and Number:

WIPO Patent Application WO/2007/020700

Kind Code:

A1

Abstract:

Disclosed is an acceleration sensor (10) wherein an acceleration sensor chip having an acceleration sensor element (16) including a plummet portion (28), which swings in accordance with the acceleration applied thereto, and a base portion (18) for supporting the acceleration sensor element (16) is mounted onto a substrate (12). A buffering member (46) is arranged between the base portion (18) and the substrate (12) for absorbing thermal stress generated when the base portion (18) and the substrate (12) are thermally expanded or contracted.

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Inventors:

TAMURA YASUHIRO (JP)

Application Number:

PCT/JP2005/015096

Publication Date:

February 22, 2007

Filing Date:

August 18, 2005

Export Citation:

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Assignee:

C & N INC (JP)
TAMURA YASUHIRO (JP)

International Classes:

G01P15/08

Foreign References:

JPH06160423A	1994-06-07
JP2002098709A	2002-04-05
JPH03125219U	1991-12-18