Title:
ACCELERATION SENSOR AND MOUNTING STRUCTURE FOR ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2016/117290
Kind Code:
A1
Abstract:
An acceleration sensor is provided with: a semiconductor substrate (14); a movable electrode (24, 25) for a first direction; a movable electrode (26, 27) for a second direction; a fixed electrode (32, 42) for the first direction; a fixed electrode (52, 62) for the second direction; and a support member (21, 22, 23a, 23b, 28). The acceleration sensor detects acceleration in the first direction and the second direction, which are in the surface direction of the semiconductor substrate. When acceleration is applied in the second direction and the movable electrode for the first direction is displaced, the increase/decrease in the length of a section opposite the movable electrode for the first direction and the fixed electrode for the first direction matches the increase/decrease in the gap between the movable electrode for the first direction and the fixed electrode for the first direction.
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Inventors:
SUGIMOTO KIYOMASA (JP)
Application Number:
PCT/JP2016/000059
Publication Date:
July 28, 2016
Filing Date:
January 07, 2016
Export Citation:
Assignee:
DENSO CORP (JP)
International Classes:
G01P15/125; B81B3/00; G01P15/08; G01P15/18; H01L29/84
Foreign References:
| JP2007139505A | 2007-06-07 | |||
| JP2004286581A | 2004-10-14 | |||
| JP2004170260A | 2004-06-17 | |||
| JP2002318244A | 2002-10-31 | |||
| JPH07260823A | 1995-10-13 |
Attorney, Agent or Firm:
KIN, Junhi (JP)
Gold Junki (JP)
Gold Junki (JP)
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