ACCELERATION SENSOR USING PIEZOELECTRIC ELEMENT

WIPO Patent Application WO/1996/010184

A1

Upper electrodes (A1 to A5) are disposed on the upper surface of a disc-like piezoelectric element (10). A ring-like groove encompassing the origin (O) is formed at a position corresponding to the upper electrodes (A1 to A5) in the lower surface of the piezoelectric element (10). The piezoelectric element (10) has a thin flexible portion where this ring-like groove is formed. When the peripheral portion of the piezoelectric element (10) is fixed to a casing, the central portion inside the ring-like groove functions as a weight suspended by the flexible portion. A lower electrode (B) is formed on the lower surface of the piezoelectric element (10). When a force acts on the weight due to acceleration, the flexible portion undergoes deflection, and a predetermined charge develops in the upper electrodes (A1 to A5) with the potential of the lower electrode (B) being a reference potential. Therefore, acceleration can be detected. When a predetermined A.C. signal is supplied between the lower electrode (B) and the upper electrodes (A1 to A5), the weight oscillates in a predetermined direction, and the angular velocity can be detected on the basis of the Coriolis force acting on the weight. Thus, a simple sensor capable of detecting both acceleration and angular velocity in a three-dimensional direction.

JP2005009934	PIEZOELECTRIC SENSOR
JP5408961	Angular velocity sensor
JPH06294653	OSCILLATION GYRO

OKADA KAZUHIRO (JP)

PCT/JP1995/001939

April 04, 1996

September 25, 1995

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WAKO KK (JP)
OKADA KAZUHIRO (JP)

G01C19/56; G01P15/09; G01P15/14; G01P15/18; (IPC1-7): G01P15/09

JPH0526744A	1993-02-02
JPH0425714A	1992-01-29

See also references of EP 0731357A4

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