ACCELERATION SENSOR

Title:

ACCELERATION SENSOR

Document Type and Number:

WIPO Patent Application WO/1996/038732

Kind Code:

A1

Abstract:

The magnitude of acceleration in a direction included in a predetermined plane is detected as an electric signal. A stationary substrate (10) and a displacement substrate (20) are disposed in parallel with each other. The stationary substrate (10) is fixed inside a cylindrical casing and the displacement substrate (20) is elastically supported therearound by support means (30) inside the cylindrical casing. A ring-like displacement electrode (E21) and a center displacement electrode (E22) are formed on the upper surface of the displacement substrate (20), and a weight (40) is fixed to the lower surface. A fixed ring-like electrode and a fixed center electrode are formed on the lower surface of the stationary substrate (10) in such a manner as to oppose the ring-like displacement electrode (E21) and the center displacement electrode (E22), respectively, and these pairs of the opposed electrodes form a ring-like capacitor (C1) and a center capacitor (C2), respectively. If the weight (40) sways due to the oscillation such as an earthquake, the displacement substrate (20) moves with respect to the stationary substrate (10). The magnitude of horizontal vibrations can be detected on the basis of the change in the capacitance value of the ring-like capacitor (C1), and the magnitude of vertical vibrations can be detected on the basis of the change in the capacitance value of the center capacitor (C2).

Inventors:

OKADA KAZUHIRO (JP)

Application Number:

PCT/JP1996/001439

Publication Date:

December 05, 1996

Filing Date:

May 29, 1996

Export Citation:

Click for automatic bibliography generation Help

Assignee:

WAKO KK (JP)
OKADA KAZUHIRO (JP)

International Classes:

B81B3/00; G01H11/06; G01P15/125; G01P15/18; (IPC1-7): G01P15/125

Foreign References:

JPH04299227A	1992-10-22
JPH07325107A	1995-12-12
JPH0882638A	1996-03-26

Other References: